Issued Patents 2019
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10519541 | Reactor system for sublimation of pre-clean byproducts and method thereof | Eric Hill | 2019-12-31 |
| 10510536 | Method of depositing a co-doped polysilicon film on a surface of a substrate within a reaction chamber | David Kohen | 2019-12-17 |
| 10446393 | Methods for forming silicon-containing epitaxial layers and related semiconductor device structures | Nupur Bhargava, Joe Margetis, Matthew G. Goodman, Robert Vyne | 2019-10-15 |
| 10388509 | Formation of epitaxial layers via dislocation filtering | Joe Margetis | 2019-08-20 |
| 10373850 | Pre-clean chamber and process with substrate tray for changing substrate temperature | Eric Hill | 2019-08-06 |
| 10262859 | Process for forming a film on a substrate using multi-port injection assemblies | Joe Margetis, Gregory Bartlett, Nupur Bhargava | 2019-04-16 |