Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10519541 | Reactor system for sublimation of pre-clean byproducts and method thereof | John Tolle | 2019-12-31 |
| 10373850 | Pre-clean chamber and process with substrate tray for changing substrate temperature | John Tolle | 2019-08-06 |