Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10480095 | System for rapid bake of semiconductor substrate with upper linear heating elements perpendicular to horizontal gas flow | Michael Halpin | 2019-11-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10480095 | System for rapid bake of semiconductor substrate with upper linear heating elements perpendicular to horizontal gas flow | Michael Halpin | 2019-11-19 |