Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10480095 | System for rapid bake of semiconductor substrate with upper linear heating elements perpendicular to horizontal gas flow | Paul Jacobson | 2019-11-19 |
| 10186450 | Apparatus and method for adjusting a pedestal assembly for a reactor | — | 2019-01-22 |