Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10460969 | Bipolar electrostatic chuck and method for using the same | John M. White | 2019-10-29 |
| 10410899 | Bipolar electrostatic chuck and method for using the same | John M. White | 2019-09-10 |
| 10184183 | Substrate temperature monitoring | — | 2019-01-22 |