Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10170277 | Apparatus and methods for dry etch with edge, side and back protection | Graeme Scott, Amitabh Sabharwal, Ajay Kumar | 2019-01-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10170277 | Apparatus and methods for dry etch with edge, side and back protection | Graeme Scott, Amitabh Sabharwal, Ajay Kumar | 2019-01-01 |