Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10199224 | Method for improving CD micro-loading in photomask plasma etching | Zhigang Mao, Xiaoyi Chen, Ajay Kumar | 2019-02-05 |
| 10170277 | Apparatus and methods for dry etch with edge, side and back protection | Saravjeet Singh, Graeme Scott, Ajay Kumar | 2019-01-01 |