Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10504719 | Cooled reflective adapter plate for a deposition chamber | Ashish Goel, Anantha K. Subramani | 2019-12-10 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10504719 | Cooled reflective adapter plate for a deposition chamber | Ashish Goel, Anantha K. Subramani | 2019-12-10 |