Issued Patents 2019
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10504719 | Cooled reflective adapter plate for a deposition chamber | Ashish Goel, Maurice E. Ewert | 2019-12-10 |
| 10490434 | Biasable rotatable electrostatic chuck | Bharath Swaminathan | 2019-11-26 |
| 10468238 | Methods and apparatus for co-sputtering multiple targets | Hanbing Wu, Wei Wang, Ashish Goel, Srinivas Guggilla, Lavinia Nistor | 2019-11-05 |
| 10431440 | Methods and apparatus for processing a substrate | Rongjun Wang, Chi Hong Ching, Xianmin Tang | 2019-10-01 |
| 10395893 | Dual-feed tunable plasma source | Edward P. Hammond, IV, Tsutomu Tanaka | 2019-08-27 |
| 10249522 | In-situ temperature measurement in a noisy environment | Hanbing Wu, Wei Wang, Aaron Muir Hunter | 2019-04-02 |
| 10236412 | Oxygen controlled PVD AlN buffer for GaN-based optoelectronic and electronic devices | Mingwei Zhu, Nag B. Patibandla, Rongjun Wang, Daniel Lee Diehl, Vivek Agrawal | 2019-03-19 |
| 10193014 | Oxygen controlled PVD AlN buffer for GaN-based optoelectronic and electronic devices | Mingwei Zhu, Nag B. Patibandla, Rongjun Wang, Daniel Lee Diehl, Vivek Agrawal | 2019-01-29 |