Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10495983 | Piecewise alignment modeling method | Tamer Coskun | 2019-12-03 |
| 10451564 | Empirical detection of lens aberration for diffraction-limited optical system | Qin Zhong, Antoine P. Manens | 2019-10-22 |
| 10429744 | Image improvement for alignment through incoherent illumination blending | Tamer Coskun | 2019-10-01 |
| 10372042 | Resolution enhanced digital lithography with anti-blazed DMD | Thomas Laidig | 2019-08-06 |