Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10236197 | Processing system containing an isolation region separating a deposition chamber from a treatment chamber | Karthik Janakiraman, Abhijit Basu Mallick, Hari Ponnekanti, Mandyam Sriram, Alexandros T. Demos +2 more | 2019-03-19 |