Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10087072 | Microelectromechanical system structure including thermal stability layer whose material has higher growth temperature, and method for fabricating the same | Chang-Sheng Hsu, Chih-Fan Hu, Chia-Wei Lee, En-Chan Chen | 2018-10-02 |
| 9961450 | Piezoresistive microphone and method of fabricating the same | Chang-Sheng Hsu, Weng-Yi Chen, En-Chan Chen, Guo-Chih Wei | 2018-05-01 |