Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10036968 | Control method of movable body, exposure method, device manufacturing method, movable body apparatus, and exposure apparatus | — | 2018-07-31 |
| 9929174 | Three-dimensional memory device having non-uniform spacing among memory stack structures and method of making thereof | Yuki Mizutani, Hiroyuki Ogawa, Fumiaki Toyama, Masaaki Higashitani, Fumitaka Amano +1 more | 2018-03-27 |