Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9979916 | Imaging apparatus and imaging system | Hiroki Hiyama, Takamasa Sakuragi, Junji Iwata, Hiroaki Kameyama, Keisuke Ota | 2018-05-22 |
| 9964851 | Resist pattern forming method and developer for lithography | Kazufumi Sato, Mitsuo Hagihara, Masahito Yahagi, Kenta Suzuki, Takayoshi Mori +1 more | 2018-05-08 |
| 9920286 | Cleaning liquid for lithography and method for forming wiring | Takahiro Eto | 2018-03-20 |