Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10101658 | Resist composition and method of forming resist pattern | Taku Hirayama, Daisuke Kawana, Shogo Matsumaru, Kenta Suzuki, Takashi Kamizono +1 more | 2018-10-16 |
| 10066096 | Method of producing structure containing phase-separated structure and resin composition for forming phase-separated structure | Tsuyoshi Kurosawa, Tasuku Matsumiya, Hitoshi Yamano, Ken Miyagi, Daiju Shiono +2 more | 2018-09-04 |
| 9964851 | Resist pattern forming method and developer for lithography | Kazufumi Sato, Mitsuo Hagihara, Tomoya Kumagai, Kenta Suzuki, Takayoshi Mori +1 more | 2018-05-08 |