Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9978563 | Plasma treatment method to meet line edge roughness and other integration objectives | Akiteru Ko | 2018-05-22 |
| 9899219 | Trimming inorganic resists with selected etchant gas mixture and modulation of operating variables | Akiteru Ko | 2018-02-20 |