Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10049875 | Trim method for patterning during various stages of an integration scheme | Angelique Raley | 2018-08-14 |
| 9978563 | Plasma treatment method to meet line edge roughness and other integration objectives | Vinh Luong | 2018-05-22 |
| 9899219 | Trimming inorganic resists with selected etchant gas mixture and modulation of operating variables | Vinh Luong | 2018-02-20 |