Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10022758 | Substrate processing apparatus and method for detecting clogging of exhaust pipe in substrate processing apparatus | Tomonori Okumura, Keisuke Tsugao | 2018-07-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10022758 | Substrate processing apparatus and method for detecting clogging of exhaust pipe in substrate processing apparatus | Tomonori Okumura, Keisuke Tsugao | 2018-07-17 |