Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10128132 | Substrate liquid processing apparatus | Junya Minamida | 2018-11-13 |
| 10022758 | Substrate processing apparatus and method for detecting clogging of exhaust pipe in substrate processing apparatus | Tomonori Okumura, Takashi Ajishi | 2018-07-17 |