SM

Shinichiro Misaka

TL Tokyo Electron Limited: 1 patents #241 of 733Top 35%
Overall (2018): #239,784 of 503,207Top 50%
1
Patents 2018

Issued Patents 2018

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10049905 Substrate heat treatment apparatus, substrate heat treatment method, storage medium and heat-treatment-condition detecting apparatus Koudai Higashi 2018-08-14