Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10049905 | Substrate heat treatment apparatus, substrate heat treatment method, storage medium and heat-treatment-condition detecting apparatus | Shinichiro Misaka | 2018-08-14 |
| 9953853 | Substrate transport apparatus | Masato Hayashi | 2018-04-24 |