Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10141187 | Mask pattern forming method, fine pattern forming method, and film deposition apparatus | Kazuhide Hasebe, Jun Ogawa, Hiroki Murakami | 2018-11-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10141187 | Mask pattern forming method, fine pattern forming method, and film deposition apparatus | Kazuhide Hasebe, Jun Ogawa, Hiroki Murakami | 2018-11-27 |