Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10141187 | Mask pattern forming method, fine pattern forming method, and film deposition apparatus | Shigeru Nakajima, Jun Ogawa, Hiroki Murakami | 2018-11-27 |
| 9970110 | Plasma processing apparatus | Jun Ogawa, Akira Shimizu | 2018-05-15 |
| 9920422 | Method and apparatus of forming silicon nitride film | Akinobu Kakimoto | 2018-03-20 |
| 9865457 | Nitride film forming method using nitrading active species | Akira Shimizu | 2018-01-09 |