Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10115591 | Selective SiARC removal | Shyam Sridhar, Li Wang, Andrew Nolan, Hiroto Ohtake, Alok Ranjan | 2018-10-30 |
| 10083820 | Dual-frequency surface wave plasma source | Jason Marion, Alok Ranjan | 2018-09-25 |
| 10063062 | Method of detecting plasma discharge in a plasma processing system | Alok Ranjan | 2018-08-28 |
| 10064262 | Apparatus for treating a gas stream | Mark Attwood | 2018-08-28 |
| 9966312 | Method for etching a silicon-containing substrate | Alok Ranjan | 2018-05-08 |