Issued Patents 2018
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10115591 | Selective SiARC removal | Shyam Sridhar, Li Wang, Andrew Nolan, Hiroto Ohtake, Sergey Voronin | 2018-10-30 |
| 10083820 | Dual-frequency surface wave plasma source | Sergey Voronin, Jason Marion | 2018-09-25 |
| 10063062 | Method of detecting plasma discharge in a plasma processing system | Sergey Voronin | 2018-08-28 |
| 9966312 | Method for etching a silicon-containing substrate | Sergey Voronin | 2018-05-08 |
| 9947597 | Defectivity metrology during DSA patterning | Vinayak Rastogi | 2018-04-17 |
| 9881807 | Method for atomic layer etching | Sonam D. Sherpa, Mingmei Wang | 2018-01-30 |