Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10151029 | Silicon nitride film forming method and silicon nitride film forming apparatus | Takeshi Oyama, Jun Ogawa | 2018-12-11 |
| 9922820 | Film forming method and film forming apparatus | Takayuki Karakawa, Toyohiro KAMADA, Akihiro Kuribayashi, Takeshi Oyama, Jun Ogawa | 2018-03-20 |
| 9892909 | Film forming method and film forming apparatus | Takayuki Karakawa, Akihiro Kuribayashi, Jun Ogawa | 2018-02-13 |