Issued Patents 2018
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10144040 | Plasma processing method and plasma processing apparatus | Wataru Yoshikawa | 2018-12-04 |
| 10083819 | Antenna and plasma processing apparatus | Koji Koyama, Jun Yoshikawa | 2018-09-25 |
| 10062547 | Plasma processing apparatus | Naoki Mihara, Jun Yoshikawa, Kazuo Murakami | 2018-08-28 |
| 10031027 | Optical nondestructive testing method and optical nondestructive testing apparatus | Kouya Yoshida, Ryota Umezawa, Jun Matsumoto | 2018-07-24 |
| 10007083 | Lens barrel | Kyoji Murayama | 2018-06-26 |
| 9984906 | Plasma processing device and plasma processing method | Yugo Tomita | 2018-05-29 |
| 9917004 | Group III nitride composite substrate and method for manufacturing the same, and method for manufacturing group III nitride semiconductor device | Keiji Ishibashi, Akihiro Hachigo, Yuki Hiromura, Seiji Nakahata, Fumitake Nakanishi +6 more | 2018-03-13 |