| 10156024 |
Zinc oxide free-standing substrate and method for manufacturing same |
Morimichi Watanabe, Hirofumi Yamaguchi, Tsutomu Nanataki |
2018-12-18 |
| 10093550 |
Method for manufacturing hexagonal plate-shaped zinc oxide particles |
Tsutomu Nanataki, Tomokatsu Hayakawa |
2018-10-09 |
| 10083819 |
Antenna and plasma processing apparatus |
Naoki Matsumoto, Koji Koyama |
2018-09-25 |
| 10062547 |
Plasma processing apparatus |
Naoki Mihara, Naoki Matsumoto, Kazuo Murakami |
2018-08-28 |
| 9970109 |
Substrate processing method and substrate processing apparatus |
Motoshi FUKUDOME |
2018-05-15 |
| 9934968 |
Method for manufacturing p-type zinc oxide film |
Masaki Tanemura, Morimichi Watanabe, Tsutomu Nanataki |
2018-04-03 |
| 9919931 |
Zinc oxide sputtering target |
Katsuhiro Imai, Koichi Kondo, Koki Kanno |
2018-03-20 |
| 9893234 |
Composite substrate for light-emitting element and production method therefor |
Morimichi Watanabe, Tsutomu Nanataki, Katsuhiro Imai, Tomohiko Sugiyama, Takashi Yoshino +2 more |
2018-02-13 |