Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10068778 | Plasma processing method and plasma processing apparatus | Yusuke Hirayama | 2018-09-04 |
| 9966291 | De-chuck control method and plasma processing apparatus | Junichi Sasaki | 2018-05-08 |