JS

Junichi Sasaki

TL Tokyo Electron Limited: 1 patents #241 of 733Top 35%
Overall (2018): #353,880 of 503,207Top 75%
1
Patents 2018

Issued Patents 2018

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
9966291 De-chuck control method and plasma processing apparatus Masaaki Miyagawa 2018-05-08