Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9984890 | Isotropic silicon and silicon-germanium etching with tunable selectivity | Subhadeep Kal, Kandabara Tapily | 2018-05-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9984890 | Isotropic silicon and silicon-germanium etching with tunable selectivity | Subhadeep Kal, Kandabara Tapily | 2018-05-29 |