Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10077188 | Manufacturing method of MEMS chip | Dan Dai, Xinwei Zhang, Guoping Zhou | 2018-09-18 |
| 9903884 | Parallel plate capacitor and acceleration sensor comprising same | Meihan Guo, Xinwei Zhang, Wei Su | 2018-02-27 |