Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10077188 | Manufacturing method of MEMS chip | Dan Dai, Xinwei Zhang, Changfeng Xia | 2018-09-18 |
| 9975766 | MEMS-based method for manufacturing sensor | Yonggang Hu | 2018-05-22 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10077188 | Manufacturing method of MEMS chip | Dan Dai, Xinwei Zhang, Changfeng Xia | 2018-09-18 |
| 9975766 | MEMS-based method for manufacturing sensor | Yonggang Hu | 2018-05-22 |