Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10157741 | Method of manufacturing a semiconductor structure | En-Chao Shen | 2018-12-18 |
| 10061211 | Method for layoutless overlay control | Yi-Ping Hsieh | 2018-08-28 |
| 10061215 | Patterning method and patterning apparatus for fabricating a resist pattern | Jui-Chun Peng, Ho-Ping Chen, Heng-Hsin Liu | 2018-08-28 |
| 9978625 | Semiconductor method and associated apparatus | Jui-Chun Peng, Ho-Ping Chen, Heng-Hsin Liu | 2018-05-22 |
| 9927719 | Overlay sampling methodology | Ying-Ying Wang | 2018-03-27 |