Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10061215 | Patterning method and patterning apparatus for fabricating a resist pattern | Yung-Yao Lee, Ho-Ping Chen, Heng-Hsin Liu | 2018-08-28 |
| 9978625 | Semiconductor method and associated apparatus | Yung-Yao Lee, Ho-Ping Chen, Heng-Hsin Liu | 2018-05-22 |
| 9863754 | Wafer alignment mark scheme | Wei-Hsiang Tseng, Chin-Hsiang Lin, Heng-Hsin Liu, Ho Ping Cheng | 2018-01-09 |