Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9887072 | Systems and methods for integrated resputtering in a physical vapor deposition chamber | Ching-Hua Hsieh, Ming-Hsing Tsai, Syun-Ming Jang | 2018-02-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9887072 | Systems and methods for integrated resputtering in a physical vapor deposition chamber | Ching-Hua Hsieh, Ming-Hsing Tsai, Syun-Ming Jang | 2018-02-06 |