Issued Patents 2018
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10163732 | Moving pyrometer for use with a substrate chamber | — | 2018-12-25 |
| 10109467 | Advanced exhaust system | Chia-Chiung Lo, Chien-Feng Lin, Tsung-Hsun Yu | 2018-10-23 |
| 10103262 | Method of forming a finFET structure with high quality EPI film | Chien-Feng Lin, Chia-Chiung Lo | 2018-10-16 |
| 10043691 | Control wafer making device | Chia-Chiung Lo, Chien-Feng Lin | 2018-08-07 |
| 9917189 | Method for detecting presence and location of defects in a substrate | Chien-Feng Lin, Zheng-Yang Pan, Shu Kuan | 2018-03-13 |
| 9881821 | Control wafer making device and method for measuring and monitoring control wafer | Chia-Chiung Lo, Chien-Feng Lin | 2018-01-30 |
| 9876521 | Sliding stand assembly | Wei-Ting Lai | 2018-01-23 |