Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9911606 | Mandrel spacer patterning in multi-pitch integrated circuit manufacturing | Chia-Ping Chiang, Ya-Ting Chang, Wen-Li Cheng, Ming-Hui Chih, Wen-Chun Huang +2 more | 2018-03-06 |
| 9880460 | Enhanced EUV lithography system | Ching-Hsu Chang, Chih-Shiang Chou, Wen-Chun Huang, Ru-Gun Liu | 2018-01-30 |