Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10121653 | Bottom-up PEALD proces | Su-Horng Lin, Chi-Ming Yang | 2018-11-06 |
| 9869018 | Solid precursor delivery method using liquid solvent for thin film deposition | Chung-Chieh Lee, Chi-Ming Yang | 2018-01-16 |