Issued Patents 2018
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10160642 | MEMS method and structure | Ting-Hau Wu | 2018-12-25 |
| 10131533 | Microelectromechanical system device and method for manufacturing the same | Shang-Ying Tsai, Yueh-Kang Lee | 2018-11-20 |
| 10087069 | Semiconductor devices with moving members and methods for making the same | Chia-Hua Chu, Chung-Hsien Lin | 2018-10-02 |
| 10071905 | Micro-electro mechanical system (MEMS) structures with through substrate vias and methods of forming the same | Chia-Hua Chu, Te-Hao Lee | 2018-09-11 |
| 10023459 | MEMS and method for forming the same | Ting-Hau Wu | 2018-07-17 |
| 9859819 | MEMS structure and method of forming same | Yi Heng Tsai, Chia-Hua Chu | 2018-01-02 |