Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10121811 | Method of high-aspect ratio pattern formation with submicron pixel pitch | Wei-Chao Chiu, Chih-Chien Wang, Ching-Sen Kuo, Chun-Wei Chang, Kai-Meng Tzeng | 2018-11-06 |
| 10090357 | Method of using a surfactant-containing shrinkage material to prevent photoresist pattern collapse caused by capillary forces | Wei-Chao Chiu, Chih-Chien Wang, Ching-Sen Kuo, Chun-Wei Chang, Kai-Meng Tzeng | 2018-10-02 |
| 9996011 | System and method for lithography alignment | Yu-Hsien Lin, Hung-Chang Hsieh, Chun-Yi Lee | 2018-06-12 |
| 9917006 | Method of planarizating film | Chihy-Yuan Cheng, Chun-Chang Wu, Shun-Shing Yang, Ching-Sen Kuo, Chun-Chang Chen | 2018-03-13 |