Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10103099 | Semiconductor devices and methods of forming same | Huang-Yi Huang, Szu-Ping Tung, Ching-Hua Hsieh | 2018-10-16 |
| 9917058 | Method of forming an interconnect structure having an air gap and structure thereof | Szu-Ping Tung, Hung-Wen Su | 2018-03-13 |
| 9887073 | Physical vapor deposition system and physical vapor depositing method using the same | Hung-Wen Su, Pei-Hsuan Lee | 2018-02-06 |
| 9873944 | Metal capping process and processing platform thereof | Szu-Ping Tung, Huang-Yi Huang, Ching-Hua Hsieh | 2018-01-23 |