Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9934991 | Method and apparatus for planarizing material layers | — | 2018-04-03 |
| 9911575 | Apparatus for charged particle lithography system | Shih-Chi Wang, Tsung-Chih Chien, Hui-Min Huang, Jaw-Jung Shin, Shy-Jay Lin | 2018-03-06 |