| 10101578 |
Micro-electro-mechanical device having a tiltable structure, with detection of the position of the tiltable structure |
Roberto Carminati, Enri Duqi |
2018-10-16 |
| 10024738 |
Capacitive micro-electro-mechanical force sensor and corresponding force sensing method |
Daniele Prati, Domenico Giusti |
2018-07-17 |
| 9975756 |
Micro-electro-mechanical pressure device and methods of forming same |
Enri Duqi, Lorenzo Baldo, Flavio Francesco Villa |
2018-05-22 |
| 9961451 |
Differential-type MEMS acoustic transducer |
Germano Nicollini, Silvia ADORNO, Andrea Barbieri, Federica Barbieri, Edoardo Marino +1 more |
2018-05-01 |
| 9936305 |
Acoustic transducer and microphone using the acoustic transducer |
Takashi Kasai, Shobu Sato, Yuki Uchida, Igino Padovani, Filippo David |
2018-04-03 |
| 9914639 |
Microelectromechanical sensor device with reduced stress-sensitivity and corresponding manufacturing process |
Enri Duqi |
2018-03-13 |