| 10113872 |
Micro-electro-mechanical device with compensation of errors due to disturbance forces, such as quadrature components |
Luca Giuseppe Falorni, Carlo Valzasina, Alessandro Tocchio |
2018-10-30 |
| 10101578 |
Micro-electro-mechanical device having a tiltable structure, with detection of the position of the tiltable structure |
Enri Duqi, Sebastiano Conti |
2018-10-16 |
| 10048491 |
MEMS device oscillating about two axes and having a position detecting system, in particular of a piezoresistive type |
Massimiliano MERLI, Marco Rossi |
2018-08-14 |
| 10018835 |
Projective MEMS device for a picoprojector of the flying spot type and related manufacturing method |
Guido Chiaretti, Fabio Luigi Grilli, Bruno Murari, Lorenzo Sarchi |
2018-07-10 |
| 9864187 |
Micromechanical structure with biaxial actuation and corresponding MEMS device |
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2018-01-09 |