Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10083838 | Methods of measuring electrical characteristics during plasma etching | Elena Becerra Woodard, Dean G. Scott | 2018-09-25 |
| 9905484 | Methods for shielding a plasma etcher electrode | Elena Becerra Woodard, Dean G. Scott | 2018-02-27 |
| 9870963 | Endpoint booster systems and methods for optical endpoint detection | Elena Becerra Woodard, Kelly Yuji Kimura | 2018-01-16 |
| 9865491 | Devices for methodologies related to wafer carriers | Elena Becerra Woodard, David J. Zapp, Steve Canale, Hyong-yong Lee, Daniel Eduardo Sanchez +1 more | 2018-01-09 |