Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9972513 | Device and method for treating a substrate with hydrofluoric and nitric acid | Yuki Saito, Konosuke Hayashi, Takashi Ootagaki | 2018-05-15 |
| 9966282 | Substrate processing apparatus and substrate processing method | Kunihiro Miyazaki, Kenji Minami, Konosuke Hayashi | 2018-05-08 |