Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9972513 | Device and method for treating a substrate with hydrofluoric and nitric acid | Yuki Saito, Takashi Ootagaki, Yuji Nagashima | 2018-05-15 |
| 9964358 | Substrate processing apparatus and substrate processing method | Jun Matsushita, Takashi Miyamoto, Osamu Yamazaki | 2018-05-08 |
| 9966282 | Substrate processing apparatus and substrate processing method | Kunihiro Miyazaki, Kenji Minami, Yuji Nagashima | 2018-05-08 |