Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10111313 | Plasma processing apparatus and plasma processing method | Takeharu MOTOKAWA, Tokuhisa Ooiwa, Kensuke Demura, Makoto Karyu, Yoshihisa Kase +1 more | 2018-10-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10111313 | Plasma processing apparatus and plasma processing method | Takeharu MOTOKAWA, Tokuhisa Ooiwa, Kensuke Demura, Makoto Karyu, Yoshihisa Kase +1 more | 2018-10-23 |