Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10111313 | Plasma processing apparatus and plasma processing method | Tokuhisa Ooiwa, Kensuke Demura, Tomoaki Yoshimori, Makoto Karyu, Yoshihisa Kase +1 more | 2018-10-23 |
| 9976948 | Phase separation observation method, phase separation observation apparatus, annealing apparatus, and producing method for substrate | — | 2018-05-22 |